Nanofabrication & Nanoelectronics

Patterning and quantum devices. IC fabrication, lithography and nanopatterning, MOSFET physics, and nanoscale and quantum electronic devices.

• IC Fabrication Process — How a design becomes silicon. Learn wafer preparation, oxidation, photolithography (resolution, EUV), etching, ion implantation and annealing, deposition (CVD, ALD, PVD), CMP, the front-end (transistor) and back-end (copper interconnect) flow, process nodes, masks, and wafer economics — dies per wafer and yield.
• Nanofabrication & Lithography — Patterning the world at the nanoscale. Learn the cleanroom environment, photolithography (resists, masks, exposure, development), the Rayleigh resolution criterion and depth of focus, resolution enhancement (immersion, phase-shift masks, multiple patterning, OPC), extreme-ultraviolet lithography, electron-beam lithography and write time, nanoimprint, focused ion beams, thin-film deposition (PVD, CVD, ALD), wet and dry etching (RIE, anisotropy), lift-off, self-assembly and directed self-assembly, and MEMS/NEMS — with Python for resolution, depth of focus and e-beam write time.
• MOSFET Device Physics & Models — The MOSFET is the building block of every digital and analog chip. Learn the MOS capacitor, inversion and threshold voltage, the cut-off/triode/saturation regions, the square-law I–V equations, channel-length modulation, body effect, subthreshold conduction, velocity saturation and short-channel effects, and why FinFETs and nanosheets replaced planar transistors.
• Nanoelectronics & Quantum Devices — Electronics where quantum mechanics rules. Learn Moore's law and scaling, short-channel effects, FinFETs and gate-all-around nanosheets, gate-oxide tunnelling and high-k dielectrics, ballistic transport and the conductance quantum, single-electron transistors and Coulomb blockade, resonant tunnelling, spintronics and MRAM, 2D-material and CNT transistors, memristors and neuromorphic devices, and qubits — with Python for tunnelling probability through thin oxides and charging energies of quantum dots.